Feature Profile Evolution in Plasma Processing Using On-wafer Monitoring System

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Feature Profile Evolution in Plasma Processing Using On-wafer Monitoring System
Springer
C$55.99 C$69.24 at Rakuten Kobo
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This book provides for the first time a good understanding of the etching profile technologies that do not disturb the plasma. Three types of sensors are introduced: on-wafer UV sensors, on-wafer charge-up sensors and on-wafer sheath-shape sensors

Categories: Computers, Monitor

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